半導体結晶工学 出浦研究室 早稲田大学理工学術院

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Publication

論文

  1. 2021-2025

  2. “Growth of high-quality InGaN thin films over whole In content range and evaluation of thermoelectric properties”
    Shota Hattori, Tsutomu Araki, and Momoko Deura
    Journal of Applied Physics 138, 24, 245301 (2025)
  3. “Noncontact and nondestructive measurements of electrical properties for Mg ion‑implanted layers on GaN single crystals using THz time‑domain spectroscopic ellipsometry”
    Dingding Wang, Takashi Fujii, Momoko Deura, Toshiyuki Iwamoto, Ryuichi Sugie, Atsushi Suyama, Hitoshi Kawanowa, and Tsutomu Araki
    MRS Advances 10, 4, 450-456 (2025)
  4. “Theoretical study on gas-phase reactions during chemical vapor deposition of TixAl1xN from TiCl4, AlCl3, and NH3
    Noboru Sato, Jun Yamaguchi, Masahiro Koto, Hayato Kubo, Takanori Sugiyama, Takahito Tanibuchi, Momoko Deura, Takeshi Momose, and Yukihiro Shimogaki
    International Journal of Chemical Kinetics 57, 3-15 (2025)
  5. “Suppression of Mixing of Metastable Zincblende Phase in GaN Crystal Grown on ScAlMgO4 Substrates by Radio-Frequency Plasma-Assisted Molecular Beam Epitaxy”
    Momoko Deura, Yuichi Wada, Takashi Fujii, and Tsutomu Araki
    Physica Status Solidi B 261, 11, 2400047 (2024)
  6. “Direct Growth of Nearly Lattice-matched InGaN on ScAlMgO4 Substrates using Radio-Frequency Plasma-Assisted Molecular Beam Epitaxy”
    Yuta Kubo, Momoko Deura, Yasuhiro Yamada, Takashi Fujii, and Tsutomu Araki
    Physica Status Solidi B 261, 11, 2400014 (2024)
  7. “Investigation of non-destructive and non-contact electrical characterization of GaN thin film on ScAlMgO4 Substrate using THz-TDSE with characteristic impedance analytical model”
    Hayato Watanabe, Dingding Wang, Takashi Fujii, Toshiyuki Iwamoto, Tsuguo Fukuda, Momoko Deura, and Tsutomu Araki
    Physica Status Solidi B 261, 11, 2400017 (2024)
  8. “GaN thickness dependence of GaN/AlN superlattices on face-to-face-annealed sputter-deposited AlN templates”
    Momoko Deura, Naoya Mokutani, Yuichi Wada, Hideto Miyake, Tsutomu Araki
    Journal of Applied Physics 136, 7, 075306 (2024)
  9. “Mechanism of SiC formation by Si surface carbonization using CO gas”
    Momoko Deura, Yutaka Ohno, Ichiro Yonenaga, and Hiroyuki Fukuyama
    Applied Surface Science 660, 159965 (2024)
  10. “Control of Metal-rich Growth for GaN/AlN Superlattices Fabrication on Face-to-Face Annealed Sputter-deposited AlN Templates”
    Naoya Mokutani, Momoko Deura, Shinichiro Mouri, Kanako Shojiki, Shiyu Xiao, Hideto Miyake, and Tsutomu Araki
    Physica Status Solidi B 260, 9, 2300061 (2023)
  11. “Substrate Terrace Width Dependence of Direct Growth of GaN on ScAlMgO4 by Radio-Frequency Molecular Beam Epitaxy”
    Yuichi Wada, Momoko Deura, Yuya Kuroda, Naoki Goto, Seiya Kayamoto, Takashi Fujii, Shinichiro Mouri, and Tsutomu Araki
    Physica Status Solidi B 260, 7, 2300029 (2023)
  12. “Effect of layer structure of AlN interlayer on the strain in GaN layers during metal-organic vapor phase epitaxy on Si substrates”
    Momoko Deura, Takuya Nakahara, Wan Chi Lee, Takeshi Momose, Yoshiaki Nakano, Masakazu Sugiyama, and Yukihiro Shimogaki
    Journal of Applied Physics 133, 16, 165301 (2023)
  13. “Direct growth of GaN film on ScAlMgO4 substrate by radio-frequency plasma-excited molecular beam epitaxy”
    Tsutomu Araki, Seiya Kayamoto, Yuuichi Wada, Yuuya Kuroda, Daiki Nakayama, Naoki Goto, Momoko Deura, Shinichiro Mouri, Takashi Fujii, Tsuguo Fukuda, Yuuji Shiraishi, and Ryuichi Sugie
    Applied Physics Express 16, 2, 025504 (2023)
  14. “Supercritical fluid deposition for conformal Cu film formation on sub-millimeter-scale structures used to fabricate terahertz waveguides”
    Yuyuan Huang, Momoko Deura, Yusuke Shimoyama, Yukihiro Shimogaki, and Takeshi Momose
    Applied Physics Express 15, 7, 075502 (2022)
  15. “Suitability of metallic materials for constructing metal-coated dielectric terahertz waveguides”
    Yuyuan Huang, Kuniaki Konishi, Momoko Deura, Yusuke Shimoyama, Junji Yumoto, Makoto Kuwata-Gonokami, Yukihiro Shimogaki, and Takeshi Momose
    Journal of Applied Physics 131, 10, 105106 (2022)
  16. “On-chip optical interconnection using integrated germanium light emitters and photodetectors”
    Kazuki Tani, Tadashi Okumura, Katsuya Oda, Momoko Deura, and Tatemi Ido
    Optics Express 29, 18, 28021-28036 (2021)
  17. “Development of a model for evaluating propagation loss of metal-coated dielectric terahertz waveguides”
    Yuyuan Huang, Kuniaki Konishi, Momoko Deura, Yusuke Shimoyama, Junji Yumoto, Makoto Kuwata-Gonokami, Yukihiro Shimogaki, and Takeshi Momose
    Journal of Applied Physics 130, 5, 055104 (2021)
  18. “Kinetic analysis of face-centered-cubic Ti1-xAlxN film deposition by chemical vapor deposition”
    Momoko Deura, Hiroki Sato, Jun Yamaguchi, Tomoko Hirabaru, Hayato Kubo, Takeshi Momose, Takahito Tanibuchi, and Yukihiro Shimogaki
    Materials Science and Engineering B 264, 114992 (2021)
  19. “Enhanced room-temperature electroluminescence from a germanium waveguide on a silicon-on-insulator diode with a silicon nitride stressor”
    Kazuki Tani, Katsuya Oda, Momoko Deura, and Tatemi Ido
    Optics Express 29, 3, 3584-3595 (2021)
  20. 2016-2020

  21. “Strain control of GaN grown on Si substrates using an AlGaN interlayer”
    Momoko Deura, Takuya Nakahara, Takeshi Momose, Yoshiaki Nakano, Masakazu Sugiyama, and Yukihiro Shimogaki
    Journal of Crystal Growth 514, 65-69 (2019)
  22. “Insight into physical processes controlling the mechanical properties of the wurtzite group-III nitride family”
    Ichiro Yonenaga, Momoko Deura, Yuki Tokumoto, Kentaro Kutsukake, and Yutaka Ohno
    Journal of Crystal Growth 500, 23-27 (2018)
  23. “Mechanical properties of cubic-BN(111) bulk single crystal evaluated by nanoindentation”
    Momoko Deura, Kentaro Kutsukake, Yutaka Ohno, Ichiro Yonenaga, and Takashi Taniguchi
    Physica Status Solidi B 255, 5, 1700473 (2018)
  24. “Characterization of femtosecond-laser-induced periodic structures on SiC substrates”
    Reina Miyagawa, Yutaka Ohno, Momoko Deura, Ichiro Yonenaga, and Osamu Eryu
    Japanese Journal of Applied Physics 57, 2, 025602 (2018)
  25. “Nanoscopic analysis of oxygen segregation at tilt boundaries in silicon ingots using atom probe tomography combined with TEM and ab initio calculations”
    Yutaka Ohno, Kaihei Inoue, Kozo Fujiwara, Kentaro Kutsukake, Momoko Deura, Ichiro Yonenaga, Naoki Ebisawa, Yasuo Shimizu, Koji Inoue, Yasuyoshi Nagai, Hideto Yoshida, Seiji Takeda, Shingo Tanaka, and Masanori Kohyama
    Journal of Microscopy 268, 3, 230-238 (2017)
  26. “Nanoindentation measurements of a highly oriented wurtzite-type boron nitride bulk crystal”
    Momoko Deura, Kentaro Kutsukake, Yutaka Ohno, Ichiro Yonenaga, and Takashi Taniguchi
    Japanese Journal of Applied Physics 56, 3, 030301 (2017)
  27. “Impact of local atomic stress on oxygen segregation at tilt boundaries in silicon”
    Yutaka Ohno, Kaihei Inoue, Kozo Fujiwara, Kentaro Kutsukake, Momoko Deura, Ichiro Yonenaga, Naoki Ebisawa, Yasuo Shimizu, Koji Inoue, Yasuyoshi Nagai, Hideto Yoshida, Seiji Takeda, Shingo Tanaka, and Masanori Kohyama
    Applied Physics Letters 110, 6, 062105 (2017)
  28. “Recombination activity of nickel, copper, and oxygen atoms segregating at grain boundaries in mono-like silicon crystals”
    Yutaka Ohno, Kentaro Kutsukake, Momoko Deura, Ichiro Yonenaga, Yasuo Shimizu, Naoki Ebisawa, Koji Inoue, Yasuyoshi Nagai, Hideto Yoshida, and Seiji Takeda
    Applied Physics Letters 109, 14, 142105 (2016)
  29. “Formation of SiC layer by carbonization of Si surface using CO gas”
    Momoko Deura and Hiroyuki Fukuyama
    Journal of Crystal Growth 434, 77-80 (2016)
  30. 2011-2015

  31. “Characterization of silicon ingots: Mono-like versus high-performance multicrystalline”
    Kentaro Kutsukake, Momoko Deura, Yutaka Ohno, and Ichiro Yonenaga
    Japanese Journal of Applied Physics 54, 8S1, 08KD10 (2015)
  32. “Elastic properties of indium nitrides grown on sapphire substrates determined by nano-indentation: In comparison with other nitrides”
    Ichiro Yonenaga, Yasushi Ohkubo, Momoko Deura, Kentaro Kutsukake, Yuki Tokumoto, Yutaka Ohno, Akihiko Yoshikawa, and Xin Qiang Wang
    AIP Advances 5, 7, 077131 (2015)
  33. “Three-dimensional evaluation of gettering ability for oxygen atoms at small-angle tilt boundaries in Czochralski-grown silicon crystals”
    Yutaka Ohno, Kaihei Inoue, Kozo Fujiwara, Momoko Deura, Kentaro Kutsukake, Ichiro Yonenaga, Yasuo Shimizu, Koji Inoue, Naoki Ebisawa, and Yasuyoshi Nagai
    Applied Physics Letters 106, 25, 251603 (2015)
  34. “Nanoscopic mechanism of Cu precipitation at small-angle tilt boundaries in Si”
    Yutaka Ohno, Kaihei Inoue, Kentaro Kutsukake, Momoko Deura, Takayuki Ohsawa, Ichiro Yonenaga, Hideto Yoshida, Seiji Takeda, Ryo Taniguchi, Hideki Otubo, Naoki Ebisawa, Yasuo Shimizu, Hisashi Takamizawa, Koji Inoue, and Yasuyoshi Nagai
    Physical Review B 91, 23, 235315 (2015)
  35. “Effect of GaP and GaP/InGaP insertion layers on the structural and optical properties of InP quantum dots grown by metal-organic vapor phase epitaxy”
    Soe Soe Han, Akio Higo, Yunpeng Wang, Momoko Deura, Masakazu Sugiyama, Yoshiaki Nakano, Somsak Panyakeow, and Somchai Ratanathammaphan
    Microelectronic Engineering 112, 143-148 (2013)
  36. “Highly Stable GaN Photocatalyst for Producing H2 Gas from Water”
    Kazuhiro Ohkawa, Wataru Ohara, Daisuke Uchida, and Momoko Deura
    Japanese Journal of Applied Physics 52, 8, 08JH04 (2013)
  37. “Investigation of Growth Mechanism for InGaN by Metal-Organic Vapor Phase Epitaxy Using Computational Fluid Simulation”
    Momoko Deura, Fumitaka Ichinohe, Yu Arai, Kenichi Shiohama, Akira Hirako, and Kazuhiro Ohkawa
    Japanese Journal of Applied Physics 52, 8, 08JB13 (2013)
  38. “Highly efficient photochemical HCOOH production from CO2 and water using an inorganic system”
    Satoshi Yotsuhashi, Hiroshi Hashiba, Masahiro Deguchi, Yuji Zenitani, Reiko Hinogami, Yuka Yamada, Momoko Deura, and Kazuhiro Ohkawa
    AIP Advances 2, 4, 042160 (2012)
  39. “High Stability and Efficiency of GaN Photocatalyst for Hydrogen Generation from Water”
    Tomoe Hayashi, Momoko Deura, and Kazuhiro Ohkawa
    Japanese Journal of Applied Physics 51, 11, 112601 (2012)
  40. “The effect of thin GaP insertion layer on InP nanostructure grown by metal-organic vapour phase epitaxys”
    Soe Soe Han, Somsak Panyakeow, Somchai Ratanathammaphan, Akio Higo, Yunpeng Wang, Momoko Deura, Masakasu Sugiyama, and Yoshiaki Nakano
    Canadian Journal of Chemical Engineering 90, 4, 915-918 (2012)
  41. “740-nm emission from InGaN-based LEDs on c-plane sapphire substrates by MOVPE”
    Kazuhiro Ohkawa, Tomomasa Watanabe, Masanori Sakamoto, Akira Iiirako, Momoko Deura
    Journal of Crystal Growth 343, 13-16 (2012)
  42. “Origin of electron mobility enhancement in (111)-oriented InGaAs channel metal-insulator-semiconductor field-effect-transistors”
    Noriyuki Miyata, Hiroyuki Ishii, Yuji Urabe, Taro Itatani, Tetsuji Yasuda, Hisashi Yamada, Noboru Fukuhara, Masahiko Hata, Momoko Deura, Masakazu Sugiyama, Mitsuru Takenaka, and Shinichi Takagi
    Microelectronic Engineering 88, 12, 3459-3461 (2011)
  43. “High Temperature Annealing Effect of Si in Group-V Ambient prior to Heteroepitaxy of InAs in Metal-Organic Vapor Phase Epitaxy”
    Momoko Deura, Yoshiyuki Kondo, Mitsuru Takenaka, Shinichi Takagi, Yukihiro Shimogaki, Yoshiaki Nakano, and Masakazu Sugiyama
    Japanese Journal of Applied Physics 50, 4, 04DH07 (2011)
  44. 2007-2010

  45. “Dependences of Initial Nucleation on Growth Conditions of InAs on Si by Micro-Channel Selective-Area Metal-Organic Vapor Phase Epitaxy”
    Yoshiyuki Kondo, Momoko Deura, Mitsuru Takenaka, Shinichi Takagi, Yoshiaki Nakano, and Masakazu Sugiyama
    Japanese Journal of Applied Physics 49, 12, 125601 (2010)
  46. In situ reflectance monitoring for the MOVPE of strain-balanced InGaAs/GaAsP quantum-wells”
    Yunpeng Wang, Ryusuke Onitsuka, Momoko Deura, Wen Yu, Masakazu Sugiyama, and Yoshiaki Nakano
    Journal of Crystal Growth 312, 8, 1364-1369 (2010)
  47. “Twin-free InGaAs thin layer on Si by multi-step growth using micro-channel selective-area MOVPE”
    Momoko Deura, Yoshiyuki Kondo, Mitsuru Takenaka, Shinichi Takagi, Yoshiaki Nakano, and Masakazu Sugiyama
    Journal of Crystal Growth 312, 8, 1353-1358 (2010)
  48. “Initial growth of InAs on P-terminated Si(111) surfaces to promote uniform lateral growth of InGaAs micro-discs on patterned Si”
    Yoshiyuki Kondo, Momoko Deura, Yuki Terada, Takuya Hoshii, Mitsuru Takenaka, Shinichi Takagi, Yoshiaki Nakano, and Masakazu Sugiyama
    Journal of Crystal Growth 312, 8, 1348-1352 (2010)
  49. “High Electron Mobility Metal-Insulator-Semiconductor Field-Effect Transistors Fabricated on (111)-Oriented InGaAs Channels”
    Hiroyuki Ishii, Noriyuki Miyata, Yuji Urabe, Taro Itatani, Tetsuji Yasuda, Hisashi Yamada, Noboru Fukuhara, Masahiko Hata, Momoko Deura, Masakazu Sugiyama, Mitsuru Takenaka, and Shinichi Takagi
    Applied Physics Express 2, 12, 121201 (2009)
  50. “Dislocation-Free InGaAs on Si(111) Using Micro-Channel Selective-Area Metalorganic Vapor Phase Epitaxy”
    Momoko Deura, Takuya Hoshii, Takahisa Yamamoto, Yuichi Ikuhara, Mitsuru Takenaka, Shinichi Takagi, Yoshiaki Nakano, and Masakazu Sugiyama
    Applied Physics Express 2, 1, 011101 (2009)
  51. “In situ passivation of GaAs surface with aluminum oxide with MOVPE”
    Yuki Terada, Momoko Deura, Yukihiro Shimogaki, Masakazu Sugiyama, and Yoshiaki Nakano
    Journal of Crystal Growth 310, 23, 4808-4812 (2008)
  52. “Effect of Ga content on crystal shape in micro-channel selective-area MOVPE of InGaAs on Si”
    Momoko Deura, Takuya Hoshii, Mitsuru Takenaka, Shinichi Takagi, Yoshiaki Nakano, and Masakazu Sugiyama
    Journal of Crystal Growth 310, 23, 4768-4771 (2008)
  53. “Kinetic analysis of surface adsorption layer for InGaAsP-related binary materials using in situ RAS”
    Momoko Deura, Yukihiro Shimogaki, Yoshiaki Nakano, and Masakazu Sugiyama
    Journal of Crystal Growth 310, 23, 4736-4740 (2008)
  54. “Epitaxial Lateral Overgrowth of InGaAs on SiO2 from (111) Si Micro Channel Areas”
    Takuya Hoshii, Momoko Deura, Masakazu Sugiyama, Ryosho Nakane, Satoshi Sugahara, Mitsuru Takenaka, Yoshiaki Nakano, and Shinichi Takagi
    Physica Status Solidi C 5, 9, 2733-2735 (2008)
  55. “Kinetic Analysis of Surface Adsorption Layer in GaAs(001) Metalorganic Vapor Phase Epitaxy by In situ Reflectance Anisotropy Spectroscopy”
    Momoko Deura, Masakazu Sugiyama, Takayuki Nakano, Yoshiaki Nakano, and Yukihiro Shimogaki
    Japanese Journal of Applied Physics 46, 10A, 6519-6524 (2007)
  56. “Impact of Atomistic Surface Structure on Macroscopic Surface Reaction Rate in MOVPE of GaAs”
    Masakazu Sugiyama, Haizheng Song, Momoko Deura, Yoshiaki Nakano, and Yukihiro Shimogaki
    Electrochemical and Solid State Letters 10, 4,  H123-H126 (2007)